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1. Electron Analyzer

1) Double-focusing full 180¡Æ spherical sector Analyzer

2) Multi-element electrostatic RADIAN input lens for spectroscopy

3) Two-dimensional, multi-channel spectroscopic detector for spectroscopy and PARXPS

2. Microfocused Monochromated X-ray Source

1) 250 mm Rowland circle monochromator

2) Microfocused electron gun and multi-position aluminum anode X-ray source

3) Spot sizes down to 15µm

3. Combined Low-energy Electron/Ion Flood Gun

1) Charge neutralization

2) Flood gun assembly incorporating electrostatic deflection for precise alignment

3) Low energy-spread, high brightness electron source

4) REELS capability

4. Ion Gun

1) Sample cleaning

2) Depth profiling

3) Ion scattering spectroscopy

5. Sample Viewing

1) Digital camera aligned normal to the sample stage for precise alignment

2) Large area chamber viewing digital camera, with two separate mounting locations

3) Co-axial and off-axis light sources

6. 5-axis Sample Stage

1) High precision, automated sample stage with internal stepper motors

2) Full stage control via the Avantage data system

3) Maximum sample size 90 ¡¿ 90 mm (maximum analysis area 70 ¡¿ 70 mm)

4) Maximum sample thickness 25 mm

8. Analysis Application

1) UPS

 - High intensity UV lamp with two stage differential pumping and manifolds

 - Helium gas admission system with two fixed-rate high precision leak valves

1) X-ray monochromator - spot size (15~400µm)

2) Angle-resolved XPS (PARXPS) - without sample tilting

3) Depth profiling - azimuthal rotation of the sample

4) Stage can accommodate large samples

5) UVL, a UV lamp for UPS measurements

6) Temperatures up to 1000K can be reached with the additional heated sample stub