1. Electron Analyzer
1) Double-focusing
full 180¡Æ spherical sector Analyzer
2) Multi-element
electrostatic RADIAN input lens for spectroscopy
3) Two-dimensional,
multi-channel spectroscopic detector for spectroscopy and PARXPS
2. Microfocused Monochromated X-ray Source
1) 250 mm
Rowland circle monochromator
2) Microfocused
electron gun and multi-position aluminum anode X-ray source
3) Spot
sizes down to 15µm
3. Combined Low-energy Electron/Ion Flood Gun
1) Charge
neutralization
2) Flood
gun assembly incorporating electrostatic deflection for precise alignment
3) Low
energy-spread, high brightness electron source
4) REELS
capability
4. Ion Gun
1) Sample
cleaning
2) Depth
profiling
3) Ion
scattering spectroscopy
5. Sample Viewing
1) Digital
camera aligned normal to the sample stage for precise alignment
2) Large
area chamber viewing digital camera, with two separate mounting locations
3) Co-axial
and off-axis light sources
6. 5-axis Sample Stage
1) High
precision, automated sample stage with internal stepper motors
2) Full stage
control via the Avantage data system
3) Maximum
sample size 90 ¡¿ 90 mm (maximum analysis area 70 ¡¿ 70 mm)
4) Maximum
sample thickness 25 mm
8. Analysis Application
1) UPS
- High intensity UV lamp with two stage
differential pumping and manifolds
- Helium gas admission system with two fixed-rate high precision leak valves
1) X-ray
monochromator - spot size (15~400µm)
2)
Angle-resolved XPS (PARXPS) - without sample tilting
3) Depth
profiling - azimuthal rotation of the sample
4) Stage
can accommodate large samples
5) UVL, a
UV lamp for UPS measurements
6)
Temperatures up to 1000K can be reached with the additional heated sample stub |