1. Electron Gun : ZrO/W(100) thermal field emission type
2. Accelerating Voltage : 200KV
3. Probe current : 0.5nA for 1nm probe diameter
4. Resolution - TEM Point image : 0.23nm - TEM Lattice image : 0.1nm
5. Objective lens - Focal length : 2.3mm - Spherical aberration : 1.0mm - Chromatic aberration : 1.4mm - Minimum step : 1.4mm
6. Magnification : x2,000 ~ x1,500,000 (TEM MAG mode)
7. Tiling X/Y : ¡¾35¡Æ/¡¾30¡Æ
8. EDS, EELS, STEM(bright, dark field) |