1. NiCol
UHR Non-Immersion FESEM Column System
1) High resolution field emission-SEM column
- High
stability Schottky field emission gun
- Automated heated apertures
- Continuous beam current control and optimized aperture angle
- Double stage scanning deflection
- Dual objective lens combining electromagnetic and electrostatic lenses
- Beam current range : 1 pA to 400 nA
- Accelerating voltage range : 200 eV – 30 keV
2) Electron Beam
Resolution at Optimum Working Distance
- High
vacuum imaging At optimum WD
¡¤
0.8 nm at 30 keV STEM
¡¤ 1.6 nm at 1 keV
2. Focused Ion Beam System
1) Sidewinder Ion Column
- High-current gallium liquid metal ion source
- Acceleration voltage : 500 V – 30 kV
- Probe
current : 0.6 pA – 65 nA in 15 steps
2) Ion Beam resolution
- High
vacuum imaging, optimum WD
¡¤ 3.0 nm (statistics over 50 edges)
¡¤ 5.0 nm (statistics over 1000's of edges)
3.
Accessories
- Analysis : Energy Dispersive Spectrometer (EDS)
- Deposition Source : Platinum (Pt), Carbon (C)
4. Stage Specifications
- Type : Eucentric goniometer stage, 5-axes motorized
- XY : 110 ¡¿ 110 mm
- Repeatability : < 2.0 µm (@ 0¡Æ tilt)
- Motorized Z : 65 mm
- Rotation : n ¡¿ 360¡Æ
- Tilt : -15¡Æ / +90¡Æ
- Max. sample height : Clearance 85 mm to eucentric point
- Max. sample weight : 500 g in any stage position (up to 2 kg at 0¡Æ tilt)
- Max. sample size : 150 mm with full rotation (larger samples possible with limited rotation)
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