1. Scanner
1) Scan range
of XY scanners: 5 µm, 40 µm,
2) Scan
range of Z scanners: 12 µm or 25 µm
2. Stage
1) Working
range of XY stage : 25 mm ¡¿ 25 mm, manual precision movement
2) Working
range of Z stage : 27.5 mm, motorized movement
3) Measureable
sample size : 80 mm ¡¿ 80 mm, 20 mm thick, and up to 500 g
3. Head
1) Detection
of cantilever deflection
- Laser Diode :
650 nm
4. Vision
1) On-axis
vision of sample surface and cantilever
- Focus range :
20 mm, motorized
- Magnification:
780¡¿ ( optional 160¡¿, 390¡¿ )
- Field of
view: 480 µm ¡¿ 360 µm
- Optical
resolution: 1 µm
5. Vision
1) Electronics
- Maximum
image size : 512 pixels
6. Software
1) XEI : AFM
data analysis software (running on Windows, MacOS X, and Linux)
7. Supporting Mode
1) True
Non-Contact Mode
2) Contact
mode
8. Accessory
1) SPM
Microscope Stage, Head and Scanner
2) Phase
Imaging (Phase Detection Microscopy)
3) Lateral
Force Microscopy and Topography can be measured simultaneously)
- Operating Mode : Contact AFM
4) Magnetic
Force Microscopy and Magnetic Field Generator
- True
non-contact imaging, simultaneous topography and MFM |