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1. Electron gun : Cold FEG
2. Accelerating Voltage : 30, 80, 200
kV
3. Resolution : TEM Point : 0.23 nm,
TEM Lattice : 0.10 nm, STEM Point : 0.078 nm (BF, DF)
4. Magnification : TEM MAG : x2,000 ~
x2,000,000, STEM MAG : x20,000 ~ x150,000,000
5. Tilt Angle : ¡¾35¡Æ/¡¾30¡Æ 6. Cs-STEM(HAADF, LAADF, ABF, BF), Dual SDD(200mm2) EDS system, 3D Tomography,
Oneview CMOS camera |